Optimum Parameters of n-m QCM Structure Based on a Parametric Three-dimensional Modeling Method

Abstract

Electrode design plays an important role in mass sensitivity of QCM. The main objective of this paper is to obtain optimal ratio of the upper to lower radius and thickness of electrodes coated on the surface of QCM for high mass sensitivity. To avoid the simplification of the control equation in the analytic analysis and acquire more accurate structure parameters, simulations are designed based on interactive parametric modeling method by APDL language in ANSYS 15.0, and the standards for optimum parameters consist of suppressing parasitic vibration modes as far as possible and improve the mass sensitivity. Compared with traditional concentric identical electrode design, we discovered that QCM with electrode radius ratio of 7:4 overall owned good quality in curve fitting of mass sensitivity over 0.9 and the highest electrode efficiency of 0.99 as for 7-4mm QCM in simulation, and experiments also confirmed that 7-4mm QCM have higher mass sensitivity than identical electrode design, which deserves a guiding significance in wafer manufacturing.